FABRICATION METHOD OF THIN FILM ACTUATED MIRROR ARRAY

摘要

PURPOSE: A fabrication method of thin film actuated mirror array is provided to prevent the detachment of a mirror from a post, thereby enhancing the stability of the mirror. CONSTITUTION: A fabrication method of thin film actuated mirror array comprises steps of: forming an actuator(210) on an active matrix(100); forming support elements(175) between the active matrix and the actuator; forming a second sacrifice layer(300) and photoresist on the actuator and the support elements; forming a hard mask(330) on the photoresist and then patterning the photoresist and the second sacrifice layer using the hard mask, thereby exposing a portion of a lower electrode and removing the hard mask; forming a stress control layer(340) on the photoresist and the exposed lower electrode; and forming a multi layered mirror(260) on the stress control layer.