| 摘要 |
PURPOSE: A thin film actuated mirror array and a fabrication method of the same are provided to form plural non-reflection layers on an active matrix and an actuator, thereby improving image quality projected on a screen. CONSTITUTION: A thin film actuated mirror array comprises an active matrix(100), a first non-reflection layer(143), support elements(175), an actuator(210), second and third non-reflection layers(235,236) on the actuator(210), and a mirror(260) on the actuator(210). The first non-reflection layer(143) and the support elements(175) are formed on the active matrix(100). The actuator(210) is formed on the support elements(175). The active matrix(100) comprises a substrate(101) having MxN P-MOS transistors(120), first metal and protect layers(135,140), a second metal layer(145) and a first non-reflection layer(143).
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