发明名称 |
HOLLOW CATHODE ARRAY FOR PLASMA GENERATION |
摘要 |
This invention relates to a cathode assembly for use in the creation of a discharge plasma. The cathode comprises a plurality of electrically conducti ve hollow plasma generating cells in an array, the cells being electrically connected to each other. The plasma generated can be used to modify surface properties of substrates, such as films, fibers, particles and other article s.
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申请公布号 |
CA2348653(A1) |
申请公布日期 |
2000.06.15 |
申请号 |
CA19992348653 |
申请日期 |
1999.12.06 |
申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
LIN, TYAU-JEEN;CHEN, JYH-HONG ERIC |
分类号 |
H05H1/24;B01J19/08;C08J7/00;H01J37/32;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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