HIGH SENSITIVE DIFFERENTIAL EDDY-CURRENT PROBE SUITABLE FOR MINIATURIZATION

摘要

PURPOSE: A high sensitive differential eddy-current probe suitable for miniaturization is provided to easily screen and enhance resolution. CONSTITUTION: A high sensitive differential eddy-current probe comprises the parts of: a drive coil(2) supplying static current from the outside to generate differential eddy current in a sample; a sense coil(#1(1a), #2(1b)) measuring the volume of the differential eddy current generated in the sample; a first sense coil(#1(1a)) around an upper ferrite(3a); a second coil(#2(1b)) around a sub-ferrite(3b); and a drive coil(2) around a spacer(4) made of a nonmagnetic nonconductor.