METHOD FOR MANUFACTURING SUPERCONDUCTION DEVICE FOR DETECTING THERMAL IMAGE

摘要

PURPOSE: A method for manufacturing a superconduction device for detecting thermal image is provided to increase the production efficiency and to shorten the process time, by way of omitting a polishing operation during manufacturing the superconduction device. CONSTITUTION: A method for manufacturing a super conduction device for detecting thermal image includes a first to a sixth steps. At the first step, an insulation preservation membrane(12) is formed on a front side of a dielectric membrane(10). At the second step, a plurality of holes(g) are formed by etching selectively the insulation preservation membrane(12) and the dielectric membrane(10) using laser etching. At the third step, a slag in the holes(g) is removed using the metal preservation membrane(12) as a mask. At the forth step, an etch stopper membrane(14) is formed in the output of the foregoing steps. At the fifth step, the etch stopper membrane(14) is removed. At the sixth step, a multi-layer membrane of "the first metal electrode(16)/Infrared Radiation absorption membrane/semi-transparency membrane" is formed on the front side of the dielectric membrane(10) including the etch stopper layer(14).