A wafer container comprising a receptacle (90) and door (20) and having two distinct levels of support axially offset from one another. The first level of support is by wafer shelves (106) contacting the bottom surface at the left side and right side of each wafer. The second level of support is provided by cushions (40, 120) securing the wafer at the front edge and back edge without one support at the left and right edges. The cushions on the door and at the rear of the receptacle are preferably removable such as by folding or compressing. The cushions preferably have V-shaped engaging elements (46) to constrain the wafer edge and to provide a ramp (55, 133) to guide and lift the front and rear edges of the wafer from the first level to the second level of support when the door is placed in position in the open front of the container.
申请公布号
WO0002798(A8)
申请公布日期
2000.06.15
申请号
WO1999US14870
申请日期
1999.07.09
申请人
FLUOROWARE, INC.;BORES, GREGORY, W.;ZABKA, MICHAEL, C.