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发明名称
Elektrostatisch-magnetische Linsenanordnung
摘要
申请公布号
DE69606515(T2)
申请公布日期
2000.06.15
申请号
DE19966006515T
申请日期
1996.07.03
申请人
ACT ADVANCED CIRCUIT TESTING GESELLSCHAFT FUER TESTSYSTEMENTWICKLUNG MBH
发明人
UEDA, KOSHI;IWAI, TOSHIMICHI;SCHOENECKER, DR.;FROSIEN, DR.;FEUERBAUM, DR.
分类号
H01J37/145;(IPC1-7):H01J37/145
主分类号
H01J37/145
代理机构
代理人
主权项
地址
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