INTEGRATED ELEMENTS WITH TRENCH FILLED WITH AIR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: An integrated elements with a trench filled with air and a method for manufacturing the same are included to transfer signals through a wiring safely by minimizing the capacitive coupling. CONSTITUTION: A method for manufacturing the integrated elements with a trench filled with air include first and second steps. In the first step, a plurality of first trenches(57) are formed in a board(30) by way of a selective etching. In the second step, air is filled in the first trench by forming a first dielectric layer(33) in the structure after the first step is performed and by filling the opening of the first trench(57). The air filled inside of the first trench(57) is accumulated to form an air layer(31).