| 摘要 |
PURPOSE: A method for producing liquid crystal display is to shorten a production process by using a three time-mask process in simultaneous etching of a double gate, etching of a source/drain and simultaneous etching of a protect film. CONSTITUTION: A method for producing in plane switching mode LCD(liquid crystal display) comprises: a step of forming many metal layers on a transparent substrate(201) and then blocking the metal layers by a first mask to simultaneously etch them to form a gate electrode and a common electrode; a step of continuously depositing an inorganic material, an amorphous silicon and an impure amorphous silicon on the gate electrode and the common electrode; a step of depositing metal on the impure amorphous silicon layer and etching it under a state of being blocked by a second mask to form a source/drain electrode(211) and an ohmic contact layer; a step of forming a protect layer(213) by depositing inorganic or organic layer on the substrate and then patterning it under a state of being blocked by a third mask with the gate insulation film and the semiconductor layer.
|
