X-SCAN SYSTEM OF ION INJECTOR

摘要

PURPOSE: An X-scan system of an ion injector is provided which can prevent the deviation of a sloped part even in the state that a logic output can not be made by a system bug or a locking of a central processing unit of an end station. CONSTITUTION: In an ion injector scanning ion beam to a plurality of wafers sent to a disc(12), an X-scan system moves the disc along the X-axis. The X-scan system comprises: a disc where a plurality of wafers(11) are loaded and fixed; a sloped part(15) inclining the disc; a scan lead screw(17) moving the sloped part in order for the disc to be X-scanned; a scan motor(19) rotating the scan lead screw; a central processing unit(25) transmitting an electrical signal controlling the scan motor; an interface plate(23) converting a signal being output from the central processing unit to a power for driving the scan motor; and a scan amplifier(22) amplifying the power being output from the interface plate to a power needed in driving the scan motor. The X-scan system further comprises a first and a second restricting switch which are installed on both sides of the scan lead screw to restrict the moving distance of the sloped part for X-scan, and, if being connected, block the power supplied to the scan motor from the scan amplifier. Therefore, the system can suppress the cost up due to the damage of a component and can construct more stable working environment.