MICROMACHINED MEMBERS COUPLED FOR RELATIVE ROTATION BY TORSIONAL FLEXURE HINGES

摘要

A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).