PROCESS FOR MAKING DOPED POLYSILICON LAYERS ON SIDEWALLS,申请号KR19970039142-传众专利搜索

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发明名称	PROCESS FOR MAKING DOPED POLYSILICON LAYERS ON SIDEWALLS
摘要
申请公布号	KR100259411(B1)	申请公布日期	2000.06.15
申请号	KR19970039142	申请日期	1997.08.18
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION.	发明人	BURNS, STUART MCALLISTER JR.;HANAFI, HUSSEIN IBRAHIM;KOCON, WALDEMAR WALTER
分类号	H01L21/3065;(IPC1-7):H01L27/10	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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