Mikromechanisches elektrostatisches Relais

摘要

The inventive micromechanical electrostatic relay has at least one base substrate (1) with a flat base electrode, and an armature tongue (21) that has been relieved from an armature substrate (2), with a flat armature electrode. A wedge-shaped air gap (10) is formed between the base substrate (1) and the armature tongue. An electret layer (15, 25) is also configured on at least one of the substrate surfaces (11; 31), this electret layer being made up of a plurality of programmable, non-volatile storage locations (EEPROMs). A switching characteristic in the form of a make-contact, a break-contact or a changeover switch can be obtained in this manner.