METHOD FOR FABRICATING POLYMER OPTICAL WAVE GUIDE BY METAL DIFFUSION

摘要

PURPOSE: A method for fabricating an optical wave guide is provided by using the principle that a refractivity is increased according to diffusion of metal ions into a polymer. CONSTITUTION: A method for fabricating an optical wave guide by metal diffusion comprises a first step for depositing a polymer core layer(2) on a substrate(1) according to spin coating; a second step for depositing a metal layer(3) by using a thermal deposition unit; a third step for forming a metal layer(4) by pattering the metal layer(3) according to an expected optical wave guide; a fourth step for forming an optical wave guide(6) by heating the above-formed layers on a heat plate(5) at a predetermined temperature for a predetermined time in order to diffuse metal ions into a polymer and remove the residual metal; and a fifth step for fabricating a polymer optical wave guide by forming an upper cladding polymer thin film(7) according to spin coating. As a result, refractivity can be minutely controlled in a wide range, and a sectional size of the optical wave guide can be easily adjusted, thereby fabricating various polymer optical devices.