| 摘要 |
A sintered ceramic part to be exposed to a corrosive gas, e.g. in semiconductor device production, has a machined surface, wherein each of grains exposed at the machined surface of the ceramic part are formed with a machined surface, and an edge of the machined surface of each of these grains is made round by material transfer. A process for producing such a sintered ceramic part includes the steps of: obtaining a machined body having a given shape by at least grinding a surface of a ceramic sintered body, and annealing the machined body. |
