| 摘要 |
PURPOSE: A device for controlling a double structure thin film type optical path and a fabrication method therefor are provided to reduce a black level. CONSTITUTION: A driving substrate(5) is formed. An actuator(65) consisting of a first sacrificial layer(not shown), a membrane(30), a lower electrode(35), a modified layer(40) and an upper electrode(45) is formed on the driving substrate(5). A second sacrificial layer(not shown) of a silicon (Si) material is formed on the front surface of the actuator(65). A metal silicide layer(47) having low reflectivity is formed on the surface of the upper electrode(45) by causing a reaction to a boundary surface between the upper electrode(45) and the second sacrificial layer by thermal treatment over 150°C. A mirror surface(60) is formed thereon. As a result, the upper electrode(45) exposed between pixels prevents unnecessary light reflection, thereby reducing a black level of the device for controlling the optical path and increasing a contrast of a screen. |
