APPARATUS FOR AUTOMATING BOAT CONVEYING IN DIFFUSION ARRANGEMENT

摘要

PURPOSE: An apparatus for automating boat conveying in a diffusion arrangement is provided for minimizing wafer loss and for saving labor power by way of automating boat conveying. CONSTITUTION: An apparatus for automating boat conveying in a diffusion arrangement includes a soft lander(SL), a diffusion arrangement(FU), a relay(6), and a soft lander actuator(M1). The relay(6) is manipulated on an order displayed by an arrangement operation program. The order manipulating the relay(6) is inserted the recipe orders. The soft lander actuator(M1) actuates the soft lander by way of the operation of the soft lander. The power applied on the loft lander actuator(M1) is turned on and off to control boat conveying.