VACUUM PACKAGING SYSTEM FOR FIELD EMISSION DISPLAY

摘要

PURPOSE: A vacuum packaging system is provided to improve a vacuum degree of an inner space and to perform a purging operation so as to reduce the amount of an active gas relatively. CONSTITUTION: An upper substrate(120) and a lower substrate(110) are spaced by a plurality of spacers(130) and an inner space(140) is formed between the upper substrate(120) and the lower substrate(110). The inner space(140) is sealed by a partition wall(150). At least the first and second two small vent holes(211,212) are prepared on the lower substrate(110). The first small vent hole(211) is connected to a vacuum pump through the first interconnection tube(221), and the second small vent hole(212) is connected to an inactive gas supplying part through the second interconnection tube(222).