| 摘要 |
A method and apparatus for producing feedstock vapors utilized in the manufacturing of silica glass is provided. The apparatus includes a means for providing a constant flow of a liquid feedstock (22), a means providing an injector gas (24), a mixer (28), an injector tube (30) having an injector entrance (34) and injector orifice (36), a means for flowing a carrier gas (26), a vaporizer chamber (32) and a vapor feedstock delivery conduit (38) which delivers feedstock vapors to a conversion site where it is converted to a silica glass. The invention produces beneficial low flow rates of feedstock vapors, particularly suited for use in the manufacture of planar optical waveguides and lightwave optical circuits. |
