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经营范围
发明名称
Electron beam exposure apparatus
摘要
申请公布号
GB0010288(D0)
申请公布日期
2000.06.14
申请号
GB20000010288
申请日期
2000.04.27
申请人
ADVANTEST CORPORATION
发明人
分类号
H01L21/027;H01J37/317
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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