METHOD FOR THE PRODUCTION OF PIEZOELECTRIC ACTUATORS AND A PIEZOELECTRIC ACTUATOR

摘要

The present invention relates to a method for the parallel manufacturing of a plurality of piezoelectric actuators as well as a corresponding piezoelectric actuator. According to the present invention, a plurality of thin foils (1-3) made of an unfired piezoelectric ceramic material are stacked one over another. On surface (4) of foils (1-3), an electrode (5-10) is provided for each actuator. For contacting electrodes (5-10) first (11-16) and second (17-22) connecting openings are provided. Electrodes (5-10) have cut-outs (23-28) which surround either first (11-16) or second (17-22) connecting openings. An electrically conductive paste (53) is introduced into connecting openings (11-22). The stacked arrangement is fired and split up into the individual actuators. As internal electrodes, the electrodes are insulated from the surroundings.