| 摘要 |
PROBLEM TO BE SOLVED: To prevent abrasion powder in a bearing part from being discharged within a clean room by forming a bottomed bearing insertion hole communicated with a pressure chamber in a piston body or a cylinder body and providing a guide shaft freely slidably fitting into the bearing insertion hole integrally with the cylinder body or the piston body. SOLUTION: When air of a prescribed pressure is supplied to a pressure chamber 42 via a control valve 45, a positive pressure source 46 and an intake and exhaust port 47, an operating rod 21 advances against force of a compression spring 57 and a work is performed within a clean room. A chamber 54 on a cylinder body 50 side is connected with a negative pressure source 56 sucking fluid via a suction port 53 and a control valve 55. Therefore, fine abrasion powder and dust having a possibility of generating within the chamber 54 can be prevented from being discharged within the clean room by normally sucking air in the chamber 54. Because rotation of a piston body 20 is constrained, durability of a diaphragm 10 can be improved.
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