发明名称 WORKING WATER CONTROL SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a working water control system capable of performing waste water treatment and recycling of working water used in a working device. SOLUTION: Working water is supplied to plural working devices from a working water adjusting device, used working water is sent to a waste water recycling device 9 through a waste water passage to regenerate the working water, the regenerated water is returned to the working water adjusting device to recycle and a small quantity of the concentrated waste water is disposed. The waste water recycling device 9 is constituted of a waste water part 9a containing a ceramic filter 12 for filtering the waste water to separate into the working water and the concentrated waste water and a regenerating part 9b containing a means for treating the working water from the waste water part 9a with ultraviolet irradiation or ion exchange and removing a fine mixture. In the waste water part 9a, the quantity of the concentrated waste water to be disposed is reduced by carrying out cross flow. The working water decreased in the quantity by recycling is properly replenished from a pure water replenishing part.
申请公布号 JP2000157996(A) 申请公布日期 2000.06.13
申请号 JP19980339791 申请日期 1998.11.30
申请人 DISCO ABRASIVE SYST LTD;NGK INSULATORS LTD;NGK FILTECH KK 发明人 SHIMOMURA ATSUSHI;YOSHIDA MIKI;KOBAYASHI NAOKI
分类号 B24B57/02;C02F9/00 主分类号 B24B57/02
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