INK JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To prevent lowering of yield and occurrence of over-etching and to reduce a residual stress of a piezoelectric thin film and a manufacturing cost. SOLUTION: In this recording head, a diaphragm membrane 3 for ejecting ink and a piezoelectric element having a piezoelectric thin film 5 in a perovskite crystal structure are formed on a face having a pressurizing chamber 2 formed thereon of an ink passage structure body 1 having the pressurizing chamber 2. A second electrode film 4 is formed on a face of the piezoelectric thin film 5 at a side of the pressurizing chamber 2. A first electrode film 7 is formed on the other face of the piezoelectric thin film 5. Gold or a gold alloy can be used for the first electrode film 7.