| 摘要 |
PROBLEM TO BE SOLVED: To enable three dimensional parallel movement in a microminiature. SOLUTION: This magnetic levitation type micro-hand is provided with magnetic actuators 1, 4, 7 consisting of a movable piece consisting of permanet magnets 3, 6, 9 arranged so as to be driven in three dimensional parallel and a stator having magnetized coils 2, 5, 8 fixed on the fixing part, a body 10 driven by these magnetic actuators 1, 4, 7, laser displacement sensors 11, 12, 13 for detecting the displacement of this driven body 10, a parallel link mechanism 14 combined with the driven body and an endeffector combined with this parallel link mechanism 14 and the adapter 15 for installing a balance weight.
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