发明名称 |
Separation of semiconductor material |
摘要 |
A method and a device for the separation of semiconductor material has the separation procedure carried out on screens coated with ice made of ultrapure water, optionally mixed with particles of semiconductor material. During the separation, the screens are sprayed with ultrapure water and the screen holes are cut free.
|
申请公布号 |
US6073773(A) |
申请公布日期 |
2000.06.13 |
申请号 |
US19990410339 |
申请日期 |
1999.10.01 |
申请人 |
WACKER-CHEMIE GMBH |
发明人 |
WOLF, REINHARD;FLOTTMANN, DIRK |
分类号 |
B07B1/00;B07B1/46;C01B33/02;(IPC1-7):B07B1/22;B03B9/00 |
主分类号 |
B07B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|