| 摘要 |
PROBLEM TO BE SOLVED: To restrain the enlargement of a grinding grain by the coagulation of a slurry being supplied to CMP device. SOLUTION: A slurry supply device is provided with enclosed slurry bottles 1, 2, a piping system 3, a wet nitrogen producing device 4, wet nitrogen supply piping 5, suction nozzles 13a, 13c, spouting nozzles 13b, 13d, a temperature adjustor 12, flow rate adjusting valves 7a-7j, 7x, liquid sending pumps 9a, 9b and a control system 10 for controlling the operation and flow rate of respective liquid sending pumps 9a, 9b. During the grinding by a CMP device, the liquid sending pumps 9a, 9b are always operated, while during the idling of the CMP device, the liquid sending pumps 9a, 9b carry out an intermittent operation for operating/stopping alternately at a fixed time interval. Without arranging the stirring mechanism such as a propeller in the slurry bottles 1, 2, the slurry 30 is spouted out from the spouting nozzles 13b, 13d and the slurry 30 is stirred.
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