| 摘要 |
In an auto-focus apparatus having an object lens 14 which condenses light on an object surface to be measured, a CCD camera 24 observing the object's image based on emitting light from the object lens 14, and an actuator 15 which displaces the object lens 14 along the optical axis based on the contrast of the object image obtained with the CCD camera 24, the auto-focus apparatus includes an illuminator 25, a projection lens 21 and a liquid crystal panel 22 on which a designated pattern is displayed and further includes a pattern projection means 20 which projects the designated pattern on the object surface to be measured.
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