| 摘要 |
PROBLEM TO BE SOLVED: To improve production efficiency, reduce corrosion of a mixing part and prevent explosive reaction by adding a raw material to fluorine gas stream, evaporating the raw material, mixing both gasses and introducing the mixed gas into a reactor heated at a reaction temperature or above of both gasses. SOLUTION: A halogen other than fluorine, e.g. chlorine and/or a halogen fluoride, such as bromine trifluoride, iodine pentafluoride or the like is used as a raw material to provide the objective halogen fluoride compound such as bromine pentafluoride, iodine heptafluoride or chlorine trifluorine. Nickel, Inconel, Monel, etc., is preferable as the material for evaporator or reactor and the evaporator is equipped with a jacket type thermal insulation apparatus capable of carrying out heating and cooling. The temperature in the evaporator is controlled to nearly boiling point of the raw material and linear rate of fluorine gas is kept to <=30 cm/sec, preferably <=5 cm/sec in order to prevent rapid reaction and corrosion due to the reaction heat. The gas linear rate in the reactor is controlled to <=10 cm/sec and a baffle plate, etc., is installed in the reactor to provide a structure making stirring and mixing of the gasses efficient.
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