| 摘要 |
A housing (12) has a proof mass (14) mounted therein for movement relative thereto by at least four different flexible supports (30, 32, 34, 36) spaced from one another. The housing (12), proof mass (14) and flexible supports (30, 32, 34, 36) are formed of a single piece of material by forming cut-out areas (60, 62, 64, 66) in the material so as to define generally planar flexible supports. In an angular accelerometer embodiment, the proof mass (12) rotates about an axis of rotation (22). Each flexible support is disposed in a plane passing through the axis of rotation; and a first pair of flexible supports is disposed in a first plane, while a second pair of flexible supports is disposed in a second plane, the first and second planes being disposed perpendicular to one another. In a linear accelerometer embodiment, a first pair of flexible supports are spaced from one another and are disposed in a first plane, and a second pair of flexible supports are spaced from one another and are disposed in a second plane. The first and second planes are spaced from one another in the direction of relative motion of the proof mass and the housing. |
