发明名称 Aluminum based alloy bridge structure and method of forming same
摘要 A bridge structure, such as an air bridge, includes a bridge element formed of an alloy including aluminum, copper, and lithium. The alloy may also further include silicon and the amount of lithium of the alloy is generally greater than about 1.0% by weight up to the maximum solubility limit of lithium in aluminum. Methods for forming bridge structures utilizing such an alloy are also described.
申请公布号 US6075278(A) 申请公布日期 2000.06.13
申请号 US19970847673 申请日期 1997.04.24
申请人 MICRON TECHNOLOGY, INC. 发明人 FARRAR, PAUL A.
分类号 H01L23/482;H01L23/532;(IPC1-7):H01L23/58 主分类号 H01L23/482
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