FABRICATION METHOD OF THIN FILM ACTUATED MIRROR ARRAY

摘要

PURPOSE: A fabrication method of thin film actuated mirror array is provided to prevent a mirror from being detached from a post due to weak bondage between photoresist and a hard mask, thereby enhancing the stability of the mirror. CONSTITUTION: A fabrication method of thin film actuated mirror array comprises steps of: forming a first sacrifice layer and an actuator(210) on an active matrix(100); forming a second sacrifice layer and photoresist on the actuator and patterning the second sacrifice using a hard mask, then removing the hard mask about a post hole; forming a post in the post hole and a mirror on the hard mask. The active matrix comprises a first metal layer a drain pad extended from a drain of a transistor.