| 摘要 |
PURPOSE: A pendulum type vacuum control system of semiconductor device manufacturing equipment is provided to enhance the productivity and lengthen the life by preventing corrosive gas such as nitrogen or argon from being accumulated on a bottom of a body housing. CONSTITUTION: An air passage(112) connected to a process chamber and an air pump passes through a body housing(110), which has an internal operating room(111) connected to the air passage(112). A step motor(113) is mounted under the body housing(110) to rotate an actuator shaft(114) projected from the operating room(111). An on/off door(116) is hinged to a top end of the actuator shaft(114) and is rotated by the guide of a guide roll(115) on the rear surface of the door to open/close the air passage(112). A sealing member(117) is mounted on the top of the operating room(111) to be contacted with the air passage(112) and has a closing ring(117) for sealing the door(116) while being dropped by an air cylinder(118).
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