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发明名称
摘要
申请公布号
JP3052414(B2)
申请公布日期
2000.06.12
申请号
JP19910101705
申请日期
1991.05.08
申请人
发明人
分类号
C30B25/12;H01L21/205;(IPC1-7):H01L21/205
主分类号
C30B25/12
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