| 摘要 |
<p>A Micro-Electro Mechanical device (20) includes a movable mechanical structure (22) and a bias mechanism (24). A bubble confinement region (28) is defined by at least a portion of the movable mechanical structure (22). A bubble generation mechanism produces a bubble (30) within the bubble confinement region (28). The bubble (30) displaces the movable structure (22) and alters the configuration of the bias mechanism (24), thereby producing useful work.</p> |
