| 摘要 |
<p>An inventive infra-red bolometer (200) comprises an active matrix level (110), a support level (120), a pair of posts (140) and an absorption level (130). The active matrix level includes a substrate having an integrated circuit, a pair of connecting terminals (114) and a protective layer (116). The support level (120) includes a bridge (122) and a pair of conduction lines (124) formed on top of the bridge (122), wherein the bridge includes a pair of anchor portions (122a), a pair of leg portions (122b) and an elevated portion (122c). The absorption level (130) includes a bolometer element (136) surrounded by an absorber (132), a reflective layer (134) located at bottom of the absorber and an IR absorber coating (138) placed on top of the absorber. Each of the posts (140) is placed between the absorption level (130) and the support level (120), wherein a top portion of each of the posts (140) is attached to the center portion of the absorber (132) and a bottom portion is attached to the elevated portion (122c) of the bridge (122).</p> |
