| 发明名称 |
PIEZO-ELECTRIC TILTING ELEMENT |
| 摘要 |
A piezo-electric tilting element consisting of layers that are arranged in a pile and contacted on both sides. The contacts are interconnected by means of through electrodes and a piezo-electrically active and piezo-electrically passive area are provided. |
| 申请公布号 |
WO0033395(A1) |
申请公布日期 |
2000.06.08 |
| 申请号 |
WO1999EP07629 |
申请日期 |
1999.10.12 |
| 申请人 |
MARCO SYSTEMANALYSE UND ENTWICKLUNG GMBH;REUTER, MARTIN |
发明人 |
REUTER, MARTIN |
| 分类号 |
H01L41/083;H01L41/09;H02N2/04 |
主分类号 |
H01L41/083 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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