AN INFLATABLE COMPLIANT BLADDER ASSEMBLY

摘要

The present invention provides a bladder assembly (130) for use in an electroplating cell (100). The bladder assembly (130) comprises a mounting plate (132), a bladder (136), and an annular manifold (146). One or more inlets (142) are formed in the mounting plate (146) and are coupled to a fluid source (138). The manifold (146) is adapted to be received in a recess (140) formed in the lower face of the mounting plate (132) and secures the bladder (136) thereto. Outlets (154) formed in the manifold (146) communicate with the inlets (142) to route a fluid from the fluid source (138) into the bladder (136) to inflate the same. A substrate (121) disposed on a contact ring (114) opposite the bladder (136) is thereby selectively biased toward a seating surface of the contact ring (119). A pumping system (159) coupled at the backside of the substrate (121) provides a pressure or vacuum condition.