INTERLINE TRANSFER CCD IMAGE SENSING DEVICE WITH ELECTRODE STRUCTURE FOR EACH PIXEL

摘要

In interline transfer type are image sensor wherein photogenerated charge is transferred from a pixel into a charge coupled dvice (CCD) or shift register. The CCD structure is typically composed of two or more overlapping levels of polysilicon electrodes associated with each row of pixels. In accordance with invention, a CCD with simplified structure and hence improved manufacturability is described. The CCD utilizes ion implanted barrier regions, which may be self-aligned such as described by Losee et al. U.S. Pat. No. 4,613,402, to produce a device with single polysilicon electrode associated with each pixel.