MEMBRANE PRESSURE SENSOR COMPRISING SILICON CARBIDE AND METHOD FOR MAKING SAME

摘要

The invention concerns a pressure sensor: a sensing element (4) incorporating a monocrystalline silicon carbide membrane (8) and produced by micromachining a polycrystalline silicon carbide, the sensing element (4) surfaces designed to be in contact with the medium being chemically inert relatively to said medium; a support (5) for the sensing element (4) such that the first surface of the membrane (8) can be contacted with the medium and the membrane second surface can be preserved from contact with the medium, the support (5) being made of polycrystalline silicon carbide; a seal bead (6), made of a material containing silicon carbide, soldered between the support (5) and the sensing element (4) to preserve the membrane second surface from all contact with the medium.