| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity without suffering from generation of worked defects by enabling removal of machined refuse even in case of generation of machined refuse through laser beam machining of a work piece. SOLUTION: In a laser beam machining device with microscope provided with a sample stage 1 on which a workpiece is placed, a microscope to visibly recognize the workpiece through an objective lense provided to a upper part thereof, and a laser beam machining means 6 to execute machining of the workpiece by using laser beam based on the result of the visible recognition, a first charging means 2 to charge the sample stage 1 on a first electric potential, an adsorptive surface 4 arranged around an objective lense 3, and a second charging means 5 to charge the adsorptive surface 4 on a second electric potential with a different polarity from the first electric potential.
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