| 发明名称 |
Methods of producing phosphosilicate glass patterns |
| 摘要 |
Disclosed is a method of producing a phosphosilicate glass layer pattern on a substrate using a polysiloxane having phosphorous added thereto and devices having a layer pattern thus made.
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| 申请公布号 |
US3877980(A) |
申请公布日期 |
1975.04.15 |
| 申请号 |
US19730324394 |
申请日期 |
1973.01.17 |
| 申请人 |
U.S. PHILIPS CORPORATION |
发明人 |
MARTIN, BARRY FORESTER;ROBERTS, EDWARD DAVID |
| 分类号 |
H01L21/30;C03C17/02;G03F7/075;G03F7/38;H01L21/00;H01L21/027;H01L21/316;H01L23/29;H01L23/31;(IPC1-7):B44D1/18 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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