发明名称 METHOD OF DRIVING DEFLECTING SYSTEM FOR PLOTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To realize a method of driving the deflecting unit for plotting device capable of performing high-speed deflection. SOLUTION: A plotting device, in which a pattern data is converted from the digital data into analog data so as to be supplied to a deflecting unit, is provided with plural D/A converting units 30 for receiving the pattern data. In supplying the output of these D/A converting units 30 to the deflecting unit through the mutual connection via a switch, the output of any one of D/A converting units 30 is supplied to the deflecting unit, and during the time of this operation, the pattern data is given to other D/A converting units so as to adjust the output thereof.
申请公布号 JP2000156193(A) 申请公布日期 2000.06.06
申请号 JP19980327990 申请日期 1998.11.18
申请人 JEOL LTD 发明人 NORISHIMA HIROAKI
分类号 H01J37/147;G03F7/20;H01J37/305;H01L21/027;(IPC1-7):H01J37/147 主分类号 H01J37/147
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