摘要 |
PROBLEM TO BE SOLVED: To lower the read-out voltage without involving risk of reading miss by applying a read-out voltage to both the first and second electrode layers of a transfer electrode pertaining to read out and reading out the signal from each photodetector to a vertical register. SOLUTION: Signal from each photodetector 1 to a vertical register 2 is read out by applying a read-out voltage to both the first and second electrode layers 3, 4 of a transfer electrode pertaining to read out. Consequently, it can contribute not only to the tooth-like part 4a of a vertical transfer electrode comprising the second layer polysilicon 4 but also the tooth-like part 3a of a vertical transfer electrode comprising the first layer polysilicon 3. Since read out to the vertical register 2 takes place across the entire longitudinal side of the photodetector 1, effective width 6 of read-out gate can be widened and the read-out voltage can be lowered correspondingly.
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