Manufacturing method of liquid jet recording head using a laser working method

摘要

A laser working method which can easily and accurately work a fine and complicated shape by irradiation of a laser beam is provided. When a plurality of channel grooves are laser worked on a second board constituting a liquid jet recording head and projections are laser worked on the joint surface of groove walls between the channel grooves and the like, the projections are first worked and formed by irradiating the laser beam through a first mask pattern of a high space frequency arranged by transmitting portions to work the projections and light shielding portions. After that, the channel grooves are worked and formed by irradiating the laser beam through a second mask pattern of a low space frequency arranged by transmitting portions to work the channel grooves and light shielding portions. The formation of a secondary product due to the laser working can be reduced. Even when the laser working secondary product exists, the influence by the secondary product can be reduced and the working can be performed. A fine and complicated shape can be stably and cheaply worked.