| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment system which can restrain that a clean room is enlarged, while productivity is improved. SOLUTION: A vacuum system treatment area 50 applying treatment of vacuum system to a glass board G and an atmosphere system treatment area 70 applying treatment of atmosphere system to the glass board G are arranged in different areas, respectively. In the vacuum system treatment area 50, treatment parts applying treatment of vacuum system to the glass board G are installed in each treatment and each layer along a carrying path 10 and arranged being divided in each lair. |
