| 摘要 |
PROBLEM TO BE SOLVED: To securely chuck and hold a workpiece as a flexible article or the like. SOLUTION: A second chucking pad 13 having flexibility provided to enclose a first chucking pad 12 is expanded using fluid while it is put to get closer to a workpiece W, the first chucking pad 12 and the second chucking pad 13 are put to get in contact with the workpiece W, and chucking force is applied to the first and the second chucking pads 12, 13 to chuck and hold the workpiece W. Rolling of the second chucking pad 13 can thus be prevented.
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