| 摘要 |
PROBLEM TO BE SOLVED: To move and control the positioning of a feeder, by preventing dust of fine magnetic material powder or the like floated in the atmosphere from being attracted to a magnet or the like arranged in a mover or stator. SOLUTION: A stator 12 is mounted in a base member 11 fixed to a column 3 vertically provided in a bed 2. A mover 8 including a quill 81 mounting a magnet plate 82 arranging a permanent magnet 83 is provided in a position opposed to the stator 12. A top plate 84 is fixed to an upper end part of the quill 8, a bottom plate 86 is fixed to a lower end part, and an upper end part of a piston 85C of an air balancer 85 inserted in the top plate 84 to be mounted in a hollow part of the quill 81 is fixed to a support member 7. The mover 8 and the stator 12 are interrupted from the outside by providing a dust proof member 9 including bellows 91, 92 in equal size between the top plate 84, base member 11, and the bottom plate 86.
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