发明名称 MANUFACTURE OF COLOR FILTER AND PURIFICATION OF PIGMENT- DISPERSED RESIST FOR COLOR FILTER
摘要 PROBLEM TO BE SOLVED: To provide a preparation method of a color filter capable of obtaining a needed transmission light quantity in a fixed wavelength by forming a chelate resulting from reaction of a chelating agent and a metallic impurity in a pigment-dispersed resist. SOLUTION: A polymer insoluble chelating agent 6 is added to a pigment- dispersed resist 4 containing a metallic impurity in a storage vessel 2, to form a polymer insoluble chelate by reacting the metallic impurity and the polymeric chelating agent 6. Furthermore, the polymer insoluble chelate is removed from the pigment-dispersed resist 4 containing the polymer insoluble chelate by a fiber 10. Then, the pigment-dispersed resist 4 from which the polymer insoluble chelate is removed is applied onto a wafer substrate 14 through a nozzle 12.
申请公布号 JP2000155210(A) 申请公布日期 2000.06.06
申请号 JP19980330798 申请日期 1998.11.20
申请人 TOSHIBA CORP 发明人 MATSUI YOSHITAKA;MASE KOICHI
分类号 G03F7/004;G02B5/20 主分类号 G03F7/004
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