| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid treatment apparatus which is used to apply the liquid treatment of a substrate especially for a flat display to the lower surface of the substrate and can respond to a plurality of substrates different in sizes without touching the treatment surface of the substrate. SOLUTION: A conveyer 21a having conveying rollers 20a... each of which is formed in the shape of a taper with its outside thickened and has steps in which the narrowest part of the outside steps is greater than the thickest part of the inside steps is arranged in a liquid treatment apparatus, and both end parts in the breadth direction of a substrate 10 are supported by the conveyer 21a for conveyance. In addition, spray nozzles 30a..., 30b... for spraying a treatment solution 50 are arranged in both upper and lower directions of the substrate 10, and by spraying the solution 50 from the spray nozzles 30b..., the lower surface of the substrate 10 is treated, and by spraying the solution 50 from the spray nozzles 30a..., the substrate 10 is conveyed stably against a lifting pressure applied to the substrate 10.
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